Lam 832-129731-013 Advanced Energy

RF Match 832-129731-013. reference can be made to the relevant parameters of the
Navigator II series RF matchers produced by Advanced Energy, which are as follows:

Cooling method: Hybrid (air and water) cooling.
Output frequency: 400kHz to 60MHz.
Input voltage: 110VAC.
Power level: 1 to 60kW.
Communication interface: Supports EtherCAT, Ethernet, DeviceNet, RS-232.
Advanced functions: Equipped with Pulsing and CEX functions.
Compliance: Conforms to CE and SEMI S2 standards.

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